Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
Publication details: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.Description: xvii, 515 p. : illSubject(s): Genre/Form: DDC classification:- 621.3815/31 22
- TK7874 .M196 2007eb
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Holdings: http://site.ebrary.com/lib/strathmore/Doc?id=10300846
Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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