01436nam a2200373Ia 4500001001200000003000800012005001700020006001900037007001500056008004100071010001700112020001500129020001500144040002100159035002100180050002400201082001800225090001700243100004000260245011400300250001200414260003600426300002500462490004200487504005100529533015200580650003100732650004400763655003400807710002200841830005100863856013100914999001701045ebr10081913CaPaEBR20260707175240.0m        u        cr cn|||||||||040825s2004    maua    sb    001 0 eng d  z  2004052959  z158053872X  z1580538711  aCaPaEBRcCaPaEBR  a(OCoLC)64673304314aTK7876b.S28 2004eb04a621.381/3222  c93606d734831 aSantos, Héctor J. de los.912164110aIntroduction to microelectromechanical microwave systemsh[electronic resource] /cHéctor J. de los Santos.  a2nd ed.  aBoston :bArtech House,cc2004.  axiii, 221 p. :bill.1 aArtech House MEMS and sensors library  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2009.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicrowave devices.9113516 0aMicroelectromechanical systems.9121642 7aElectronic books.2local91902 aebrary, Inc.9191 0aMicroelectromechanical systems series.912164340uhttp://site.ebrary.com/lib/strathmore/Doc?id=10081913zAn electronic book accessible through the World Wide Web; click to view  c93606d73483