TY - BOOK AU - Santos,Héctor J.de los ED - ebrary, Inc. TI - Introduction to microelectromechanical microwave systems T2 - Artech House MEMS and sensors library AV - TK7876 .S28 2004eb U1 - 621.381/3 22 PY - 2004/// CY - Boston PB - Artech House KW - Microwave devices KW - Microelectromechanical systems KW - Electronic books KW - local N1 - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries UR - http://site.ebrary.com/lib/strathmore/Doc?id=10081913 ER -