01899nam a2200397Ia 4500001001200000003000800012005001700020006001900037007001500056008004100071020001500112040002100127035002100148050002300169082001600192090001700208245021100225260005500436300001300491490002500504500003900529500015500568533015200723650003200875650003700907650002800944655003400972700003701006710007501043710006801118710011101186710002201297830003401319856013101353999001701484ebr10071430CaPaEBR20260707175056.0m        u        cr cn|||||||||050323s1995    dcu     s     000 0 eng d  z0309575168  aCaPaEBRcCaPaEBR  a(OCoLC)64672750414aTA2020b.P5 1995eb04a621.044222  c91929d7180600aPlasma processing and processing scienceh[electronic resource] /cPanel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.  aWashington, D.C. :bNational Academy Press,c1995.  ax, 35 p.1 aNRL strategic series  aCommittee chair:  Francis F. Chen.  aThis work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2009.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aPlasma engineering.9117235 0aSemiconductorsxEtching.9117236 0aPlasma etching.9117237 7aElectronic books.2local91901 aChen, Francis F.,d1929-91172382 aNational Research Council (U.S.).bPanel on Plasma Processing.91172392 aNational Research Council (U.S.).bNaval Studies Board.91172402 aNational Research Council (U.S.).bCommission on Physical Sciences, Mathematics, and Applications.91172412 aebrary, Inc.9191 0aNRL strategic series.911724240uhttp://site.ebrary.com/lib/strathmore/Doc?id=10071430zAn electronic book accessible through the World Wide Web; click to view  c91929d71806