01767nam a2200373Ia 4500001001200000003000800012005001700020006001900037007001500056008004100071020001500112040002100127035002100148050002300169082001600192245021100208260005500419300001300474490002500487500003900512500015500551533015200706650002400858650002900882650002000911655002900931700002900960710006700989710006001056710010301116710001701219830002601236856013101262ebr10071430CaPaEBR20260707175056.0m        u        cr cn|||||||||050323s1995    dcu     s     000 0 eng d  z0309575168  aCaPaEBRcCaPaEBR  a(OCoLC)64672750414aTA2020b.P5 1995eb04a621.04422200aPlasma processing and processing scienceh[electronic resource] /cPanel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.  aWashington, D.C. :bNational Academy Press,c1995.  ax, 35 p.1 aNRL strategic series  aCommittee chair:  Francis F. Chen.  aThis work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2009.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aPlasma engineering. 0aSemiconductorsxEtching. 0aPlasma etching. 7aElectronic books.2local1 aChen, Francis F.,d1929-2 aNational Research Council (U.S.).bPanel on Plasma Processing.2 aNational Research Council (U.S.).bNaval Studies Board.2 aNational Research Council (U.S.).bCommission on Physical Sciences, Mathematics, and Applications.2 aebrary, Inc. 0aNRL strategic series.40uhttp://site.ebrary.com/lib/strathmore/Doc?id=10071430zAn electronic book accessible through the World Wide Web; click to view