TY  - BOOK
AU  - Tabata,Osamu
AU  - Tsuchiya,Toshiyuki
ED  - ebrary, Inc.
TI  - Reliability of MEMS: testing of materials and devices 
T2  - Advanced micro & nanosystems
AV  - TK7875 .R45 2013eb
U1  - 539.60113 23
PY  - 2013///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Microelectromechanical systems
KW  - Reliability
KW  - Electronic books
KW  - local
N1  - First edition 2007; Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/strathmore/Doc?id=10682369
ER  -