@book{125480,
	author = {Eynon, Benjamin G. and Wu, Banqiu. and ebrary, Inc.},
	title = {Photomask fabrication technology},
	publisher = {McGraw-Hill,},
	year = {c2005.},
	series = {McGraw-Hill electronic engineering},
	address = {New York :},
	url = {http://site.ebrary.com/lib/strathmore/Doc?id=10195649}
}