Introduction to microelectromechanical microwave systems [electronic resource] /

Santos, Héctor J. de los.

Introduction to microelectromechanical microwave systems [electronic resource] / Héctor J. de los Santos. - 2nd ed. - Boston : Artech House, c2004. - xiii, 221 p. : ill. - Artech House MEMS and sensors library . - Microelectromechanical systems series. .

Includes bibliographical references and index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.






Microwave devices.
Microelectromechanical systems.


Electronic books.

TK7876 / .S28 2004eb

621.381/3

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